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Atomic Layer Deposition (ALD) Lab

Published:2012-10-18 10:14:20 From:Editor hits:
Atomic Layer Deposition (ALD) Lab Research
   (1)Design, Synthesis and Commercialization of ALD precursors;
   (2)Thin Film Growth by ALD and its application;
   (3)R&D of ALD instrumentation.
The lab will accomplish the following objectives: 1) design and synthesis of ALD precursors; 2) make improvement on ALD techniques/process and demonstrate the utility of deposited thin films/coatings for various materials applications; 3) perform materials computation and reveal the structure-properties relationship.  The lab will generally root in both fundamental research and industrialization, especially in R&D of high-k materials in semiconductors, lithium batteries and renewable energy materials.