（1）Design, Synthesis and Commercialization of ALD precursors；
（2）Thin Film Growth by ALD and its application；
（3）R&D of ALD instrumentation.
The lab will accomplish the following objectives: 1) design and synthesis of ALD precursors; 2) make improvement on ALD techniques/process and demonstrate the utility of deposited thin films/coatings for various materials applications; 3) perform materials computation and reveal the structure-properties relationship. The lab will generally root in both fundamental research and industrialization, especially in R&D of high-k materials in semiconductors, lithium batteries and renewable energy materials.