Total Hours: 48
Credits: 3
Assessment: Closed-book Exam
I. Course Overview
This course targets materials science, microelectronics, optical engineering, and nanotechnology. It systematically covers core micro/nano fabrication technologies and applications in chip manufacturing, including optical lithography (laser direct writing, DUV, EUV), electron-beam lithography, focused ion beam processing, nanoimprint, deposition, and etching. It introduces equipment principles and manufacturers, preparing students for careers in semiconductor, photonic, quantum, and MEMS devices.
II. Detailed Syllabus
1. Introduction: concepts, history, classification, Moore’s Law
2. Foundational processes: layout design, PVD/CVD/ALD, lithography, etching, doping, metallization, wafer cleaning
3. Optical lithography: photoresist, mask alignment/projection, OPC, PSM
4. Advanced lithography: immersion, phase-shifting, DUV/EUV, High-NA EUV, domestic tools
5. EBL fundamentals: electron optics, scattering, proximity effect correction, high-resist processes
6. EBL applications: multi-beam tools (JEOL, Raith), nanodevice examples
7. FIB: ion source, sputtering, deposition, chip repair, TEM sample prep
8. Nanoimprint: hot embossing, UV-NIL, soft lithography, PDMS, 3D NAND application
9. Deposition-based patterning: lift-off, electroplating, high-aspect-ratio metallization
10. Etching: wet isotropic/anisotropic, dry (RIE, DRIE, ALE), endpoint detection
11. Metallization: Al vs Cu, barrier/seed layers, CMP, wire bonding/flip-chip
12. Semiconductor chip applications: FinFET/GAA, SMIC case studies
13. Quantum chip applications: superconducting nanowire detectors, heterointegration
14. Optoelectronic applications: silicon photonics, III-V laser integration
15. Micro-nano platforms: PKU Shenzhen facility, safety, global comparison (IMEC)
16. Review and Q&A
III. Textbooks
Zheng Cui. Micro-Nano Fabrication Technology and Applications (4th ed.). Higher Education Press, 2020.
VI. Reference
[1] Jiwang Yan. Micro and Nano Fabrication Technology. Springer, 2018.
[2] Chip Manufacturing: Practical Guide to Semiconductor Processes (6th ed.). Publishing House of Electronics Industry.
[3] Benjamin Lin. Lithography Technology (2nd ed.). Chemical Industry Press.
